Method for manufacturing multilayer ceramic electronic element

ABSTRACT

A method for manufacturing a multilayer ceramic electronic element includes the steps of forming ceramic green sheets having superior surface smoothness and small variations in thickness at a high speed, in which defects such as pinholes are prevented from occurring, and providing internal electrodes and step-smoothing ceramic paste on the ceramic green sheets with high accuracy. The method includes the steps of applying ceramic slurry to a base film by a die coater followed by drying performed in a drying furnace for forming the ceramic green sheets, and performing gravure printing of conductive paste and ceramic paste onto the ceramic green sheets by using a first and a second gravure printing apparatus, respectively. Accordingly, the internal electrodes are formed, and the step-smoothing ceramic paste is provided in regions other than those in which the internal electrodes are formed.

This application is a Divisional Application of U.S. patent applicationSer. No. 10/318,264 filed Dec. 13, 2002, now abandoned.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to methods for manufacturing multilayerceramic electronic elements such as a multilayer ceramic capacitor, andmore particularly, relates to an improved method for manufacturing amultilayer ceramic electronic element having a structure in which aceramic sintered body includes internal electrodes laminated to eachother with ceramic layers provided therebetween and in which stepsbetween portions at which the internal electrodes are formed andportions at which the internal electrodes are not formed are smoothed.

2. Description of the Related Art

When multilayer ceramic electronic elements, such as a multilayerceramic capacitor, are formed, a plurality of ceramic green sheetshaving internal electrodes printed thereon is laminated to each other.In addition, ceramic green sheets having no internal electrodes areprovided at the top and the bottom of the stack of ceramic green sheetsthus laminated to form a laminate body. After being compressed in thethickness direction of the laminate body, the laminate body is fired,thereby forming a ceramic sintered body.

When the laminate body described above is compressed, the portion atwhich the internal electrodes overlap each other and the portion atwhich the internal electrodes are not formed have thicknesses that aredifferent from each other, and as a result, there has been a problem inthat steps are formed between the two portions described above.

In Japanese Unexamined Patent Application Publication No. 8-250370, amethod for manufacturing a multilayer ceramic capacitor has beendisclosed in which the steps as described above can be smoothed.According to this manufacturing method, ceramic slurry is first printedonto base films by gravure printing to form dielectric ceramic greensheets. Next, conductive paste is applied by gravure printing to theceramic green sheets thus formed so as to form internal electrodes.Subsequently, ceramic paste for smoothing steps is applied bygravure-printing, in a manner similar to the printing mentioned above,to regions in which the internal electrodes are not printed, and theinternal electrodes and the ceramic paste for smoothing steps are thendried. By repeating these steps described above at least twice, thestructure can be formed in which at least two composite sheets, whichare each formed of the internal electrodes and a ceramic pattern forsmoothing steps printed onto the base film, are laminated to each other.When a plurality of the composite sheets thus formed is laminated toeach other and is then compressed in the thickness direction, a laminatebody can be formed, and by firing this laminate body, a ceramic sinteredbody can be obtained.

According to the technique disclosed in the publication described above,on the surface of the ceramic green sheet, since the ceramic pattern forsmoothing steps is printed in regions in which the internal electrodesare not printed, the steps, which are formed between the portion atwhich the internal electrodes overlap each other and the portion atwhich the internal electrodes are not formed, can be smoothed.

The miniaturization and higher capacity of multilayer ceramic capacitorshave been increasingly advanced, and along with this advancement,attempts to increase the number of layers of the internal electrodes andto decrease the thickness of the ceramic green sheet have been made. Asa result, the thickness of the ceramic green sheet is decreased to 3 μmor less, and in some cases, the thickness thereof is even more decreasedto 2 μm or less.

In the ceramic green sheet having a small thickness as described above,pin holes may be easily formed or the surface smoothness may be degradedin some cases. In addition, as the number of the internal electrodes isincreased, the influence of the steps, which are formed between theportions at which the internal electrodes overlap each other and theportions at which the internal electrodes are not formed, becomessignificant.

Accordingly, there has been a problem in that appearance defects of theceramic sintered body thus formed occur because of the presence of thesteps described above, or structural defects, delamination, or otherproblems occur because of the difference in density between both sidesof the step.

According to the technique disclosed in Japanese Unexamined PatentApplication Publication No. 8-250370, as described above, an attempt hasbeen made to smooth the steps by printing the ceramic pattern providedfor smoothing steps.

However, according to the technique described above, the formation ofthe ceramic green sheet is performed by gravure printing. In gravureprinting, as shown in FIG. 7, a gravure roller 101 having a plurality ofprinting portions provided on the peripheral surface thereof and alignedin the circumferential direction is used. One printing portion providedon the peripheral surface of the gravure roller 101 is composed of agreat number of cells 102, as shown in FIG. 8A.

According to the technique described above, a long base film 103 shownin FIG. 7 is conveyed in the direction indicated by the arrow in thefigure, and by using the gravure roller 101 and a roller 104 pressingthe base film 103 to the gravure roller 101, printing is performed. Forexample, when a ceramic green sheet is printed, as shown in FIG. 8A,ceramic slurry 105 is applied to a great number of the cells 102, whichform a printing figure, and is then transferred to one major surface ofthe base film. In this case, as shown in FIG. 8B, the ceramic slurry 105is dispersed on the base film 103 so as to form a shape that conformswith that of the cells 102. Subsequently, the ceramic slurry 105dispersed at one position is brought into contact with that dispersed atan adjacent position with time, and hence, as shown in FIG. 8C, levelingis performed, thereby forming a flat ceramic green sheet 106.

However, as described above, according to gravure printing, since theceramic slurry 105 is transferred from a great number of the cells 102to the base film 103, and the ceramic green sheet is formed by leveling,there has been a problem in that a time required for forming the ceramicgreen sheet 106 is determined by the time required for leveling.Accordingly, specifically in the case in which the number of sheets tobe laminated to each other is increased, the formation of the ceramicgreen sheets takes a long period of time, and hence the cost isdisadvantageously increased.

In addition, as described above, the ceramic slurry is transferred froma plurality of the cells, and leveling is then performed. However,irregularities tend to be formed on the surface of the ceramic greensheet thus formed, and as a result, the surface smoothness thereof maynot be satisfactory in some cases. In addition, variation in thicknessof the ceramic green sheet is also inevitably increased. Furthermore,when the thickness of the ceramic green sheet is decreased, a problemmay arise in that pinholes are likely to be formed. As a result, for thetechnique disclosed in the above-described publication, it has been verydifficult to respond the trend toward thinner ceramic green sheets.

In addition, after the internal electrodes are formed, the ceramicpattern for smoothing steps is then formed by gravure printing, andnext, the internal electrodes and the ceramic pattern are simultaneouslydried. Accordingly, exudation is liable to occur between the internalelectrodes and the ceramic pattern, and as a result, it has beendifficult to improve printing accuracy of the internal electrodes. Inparticular, after the internal electrodes are printed, exudation isliable to occur along the peripheries of the internal electrodes beforethe ceramic pattern is printed. Hence, variations in electrostaticcapacity of a multilayer capacitor, which is obtained as a product, isinevitably increased.

In addition, according to the technique described in the publicationdiscussed above, after being formed, the ceramic green sheets are incontact with a solvent contained in the conductive paste for forminginternal electrode or a solvent contained in the ceramic paste forforming the ceramic pattern for a long period of time. Accordingly, theceramic green sheet may be damaged by the solvent in some cases, andhence short-circuiting, insulation defect, or other problems are liableto occur in the resulting multilayer capacitor.

SUMMARY OF THE INVENTION

In order to overcome the problems described above, preferred embodimentsof the present invention provide a method for manufacturing a multilayerceramic electronic element having high performance. According to themethod of preferred embodiments of the present invention, even when thethickness of a ceramic green sheet is decreased, pinholes are preventedfrom being formed therein, a ceramic green sheet having superior surfacesmoothness is easily and readily formed at a reasonable cost, internalelectrodes are formed with high accuracy, desirable properties aresecurely obtained, and undesirable short-circuiting and insulationdefects are unlikely to occur.

According to a preferred embodiment of the present invention, a methodfor manufacturing a multilayer ceramic electronic element, includes thesteps of applying ceramic slurry to a base film using a die coater forforming ceramic green sheets, applying conductive paste to the uppersurfaces of the ceramic green sheets by gravure printing for forminginternal electrodes, printing ceramic paste (hereinafter referred to as“step-smoothing ceramic paste) for smoothing steps onto the uppersurfaces of the ceramic green sheets in regions other than those inwhich the internal electrodes are formed, laminating the ceramic greenssheets having the internal electrodes and the step-smoothing ceramicpaste to each other with at least one ceramic green sheet having neitherthe internal electrodes nor the step-smoothing ceramic paste for forminga laminate, firing the laminate for forming a sintered body, and formingexternal electrodes on external surfaces of the sintered body so as tobe electrically connected to the internal electrodes.

The method described above according to a preferred embodiment of thepresent invention may further include a step of drying or partiallydrying the internal electrodes continuously after the applying step forforming the internal electrodes. The internal electrodes are formed byapplying conductive paste, and it is not always necessary that thisconductive paste be in a fully dried state. As described above, theconductive paste may also be in a partially dried state. In the presentinvention, the partially dried state means a state in which a solvent isnot totally removed, but the shapes of the internal electrodes thusprinted are maintained. That is, the state in which the solvent ispartially removed so that exudations or other defects and problems inthe internal electrodes are prevented from occurring. As describedabove, when being semi-dried or dried after the applying step forforming the internal electrodes, the internal electrodes are unlikely toexude, and hence the accuracy of the internal electrodes can be furtherimproved.

In the method according to preferred embodiments of the presentinvention described above, the applying step for forming the internalelectrode may precede the printing step of printing the step-smoothingceramic paste, or vice versa.

In addition, the method described above may further include a step ofdrying the step-smoothing ceramic paste following the printing step, andas a result, a composite sheet thus formed can be immediately removed.

In the method according to a preferred embodiment of the presentinvention described above, the base film may be a long base film, andthe forming step may be performed while the long base film is conveyedin the length direction thereof. Accordingly, long ceramic green sheetscan be obtained at very high speed by using a die coater.

In the method according to a preferred embodiment of the presentinvention described above, the applying step and the printing step maybe continuously performed while the long ceramic green sheets areconveyed in the length direction thereof. When these two steps arecontinuously performed, the productivity of the multilayer ceramicelectronic element can be improved.

In the method according to a preferred embodiment of the presentinvention described above, after the application step for forming theinternal electrodes, the printing step of printing the step-smoothingceramic paste may be performed. Alternatively, after the printing stepof printing the step-smoothing ceramic paste, the applying step forforming the internal electrodes may be performed.

In the method according to preferred embodiments of the presentinvention described above, the ceramic green sheets and thestep-smoothing ceramic paste may primarily form a dielectric ceramicused for a multilayer ceramic capacitor as the multilayer ceramicelectronic element. The method for manufacturing a multilayer ceramicelectronic element, according to preferred embodiments of the presentinvention, is preferably used for the production of multilayer ceramiccapacitors and, in addition, may also be applied to the production ofother multilayer ceramic electronic elements other than the multilayerceramic capacitors. As the other multilayer ceramic electronic elements,for example, multilayer inductors, multilayer noise filters, multilayerthermistors, multilayer varistors, multilayer LC filters, high-frequencymodule ceramic multilayer substrates and other suitable multilayerelectronic components may be formed according to this method.

Other elements, features, characteristics and advantages of the presentinvention will become more apparent from the following detaileddescription of preferred embodiments of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A and 1B are schematic views showing manufacturing apparatusesused for a preferred embodiment of the present invention, where FIG. 1Ais a schematic view showing a manufacturing apparatus including a diecoater for forming a ceramic green sheet, and FIG. 1B is a schematicview showing the structure including a first and a second gravureprinting apparatus for printing internal electrodes and step-smoothingceramic paste;

FIGS. 2A to 2C are views showing manufacturing steps according to apreferred embodiment of the present invention, where FIG. 2A is a viewshowing the state in which a ceramic green sheet is provided on a basefilm, FIG. 2B is a view showing the state in which internal electrodesare printed onto the ceramic green sheet, and FIG. 2C is a view showingthe state in which step-smoothing ceramic paste is printed;

FIG. 3 is a cross-sectional view of a mother laminate formed on alamination stage by a transfer process;

FIG. 4 is a cross-sectional view of the structure formed of a pluralityof composite sheets provided on a base film;

FIG. 5 is a front cross-sectional view of a ceramic sintered body forforming one multilayer capacitor;

FIG. 6 is a front cross-sectional view of a multilayer ceramic capacitoraccording to a preferred embodiment of the present invention;

FIG. 7 is a schematic view showing the structure for performing gravureprinting of ceramic paste according to a conventional method formanufacturing a multilayer ceramic electronic element;

FIGS. 8A to 8C are partially enlarged cross-sectional views showingsteps of supplying ceramic paste from a gravure roller to a base filmfor printing according to a conventional method;

FIG. 9 is a cross-sectional view showing an intermediate laminate formedby providing a second ceramic green sheet on both internal electrodesand step-smoothing ceramic paste, which are provided on a ceramic greensheet; and

FIG. 10 is a cross-sectional view showing a laminate formed of theintermediate laminates shown in FIG. 9.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

Hereinafter, referring to drawings, particular preferred embodimentswill be described so that the present invention will be clearlyunderstood.

FIGS. 1A and 1B are schematic views each showing the structure of anapparatus used for a method for manufacturing a multilayer ceramicelectronic element, according to one preferred embodiment of the presentinvention; FIG. 1A is a view showing the structure of an apparatuspreferably used for forming a ceramic green sheet; and FIG. 1B is a viewshowing the structure of an apparatus for performing gravure printing ofinternal electrodes and ceramic paste. In this preferred embodiment, asthe multilayer ceramic electronic element, multilayer ceramic capacitorsare preferably manufactured.

As shown in FIG. 1A, a long base film 2 is supplied to a die coater 4from a supply reel 1 through a roller 3. As the base film 2, a film madeof an appropriate synthetic resin, such as polypropylene (PP),poly(ethylene terephthalate) (PET), or poly(ethylene naphthalate) (PEN),or other suitable material, is preferably used.

The die coater 4 has a coating head 4 a and rollers 4 b and 4 c. Thecoating head 4 a is communicated to a tank 6 containing ceramic slurrythrough a pump 5. By the pump 5, the ceramic slurry is supplied to thecoating head 4 a and is then applied to one major surface of the basefilm 2 from a front end of the coating head 4 a.

The base film 2 is conveyed from the supply roller 1 to a take-up reel 7shown in FIG. 1A. The ceramic slurry, which is ejected from the coatinghead 4 a on the base film 2 and forms a predetermined thickness thereon,is supplied to a drying furnace 9 through a roller 8. In the dryingfurnace 9, the ceramic slurry is dried, thereby forming a ceramic greensheet.

That is, as shown in FIG. 2A, a ceramic green sheet 10 is formed on thebase film 2. The ceramic green sheet 10 thus dried is then taken uptogether with the base film 2 by the take-up roller 7 through rollers 11and 12.

In this preferred embodiment, the ceramic slurry is applied to the basefilm 2 by the die coater 4, and compared to another coating device, forexample, having a gravure roller, a doctor blade, a reverse roll coater,or the like, the die coater 4 can form a ceramic green sheet 10 having athickness of approximately 10 μm or less with high accuracy. Inparticular, even when a ceramic green sheet having a thickness ofapproximately 2 μm or less is formed, variations in thickness thereofcan be controlled to about 10% or less, and any pinholes or lines arenot formed on the surface of the ceramic green sheet 10.

In addition, the surface roughness can be controlled to about 0.2 μm orless. In addition, when the die coater 4 is used, the ceramic slurry canbe coated at a speed of about 50 m/min or more.

Accordingly, in this preferred embodiment, a thin ceramic green sheet 10without any pinholes can be formed at a high speed. In addition, aceramic green sheet having a small variation in thickness and superiorsurface smoothness, as described above, can be obtained.

The ceramic slurry described above is not specifically limited, and anappropriate dielectric ceramic, such as a barium titanate-based ceramic,for forming multilayer ceramic capacitors may be used as a primarycomponent together with a solvent, binding resin, and other suitablematerial.

Next, a composite sheet composed of the ceramic green sheet 10 providedon the base film 2 is supplied from the take-up reel 7 to a gravureprinting apparatus shown in FIG. 1B.

As shown in FIG. 1B, a composite sheet 14 composed of the ceramic greensheet 10 provided on one major surface of the base film 2 is supplied toa first gravure printing apparatus 21 so that the ceramic green sheet 10faces downward. In this first gravure printing apparatus 21, thecomposite sheet 14 is conveyed in the length direction through rollers22 and 23 and is then supplied between a gravure roller 24 and apressure roller 25. A lower part of the gravure roller 24 is immersed inconductive paste 26. The gravure roller 24 is rotated in the directionindicated by the arrow in the figure. In addition, on the peripheralsurface of the gravure roller 24, a plurality of printing portions inconformity with an internal electrode pattern to be formed are dispersedin the circumferential direction.

In the figure, reference numeral 27 indicates a blade for scrapingexcess conductive paste off of the roller.

While the composite sheet 14 passes between the gravure roller 24 andthe pressure roller 25, conductive paste is applied to the surface ofthe ceramic green sheet 10 constituting the composite sheet 14 so as toform a shape in accordance with a printing figure formed on the gravureroller 24, thereby forming internal electrodes 28 shown in FIG. 2B.

Subsequently, a plurality of the composite sheets 14 is conveyed to adrying furnace 30 through a roller 29, and in this drying furnace 30,the internal electrodes 28 are partially dried or dried.

In the drying furnace 30, an appropriate heater is arranged so as toremove a solvent contained in the conductive paste by heating. In thiscase, it is not always necessary to remove the entire solvent from theinternal electrode 28, and drying may be performed so that exudation andother problems or defects are unlikely to occur along the periphery ofthe internal electrode 28. That is, the internal electrode 28 in apartially dried state may be supplied from the drying furnace 30.

Next, the composite sheet including the internal electrodes 28 issupplied to a second gravure printing apparatus 34 through rollers 31 to33. The second gravure printing apparatus 34 has a gravure roller 35 anda pressure roller 36. In this apparatus, printing portions are providedon the peripheral surface of the gravure roller 35 for applying ceramicpaste to regions other than those in which the internal electrodes 28are formed.

That is, the printing portions are provided on the peripheral surface ofthe gravure roller 35 for printing step-smoothing ceramic paste. A lowerpart of the gravure roller 35 is immersed in ceramic paste 37. In thefigure, reference numeral 38 indicates a blade for scraping excessceramic paste off of the roller. While the composite sheet describedabove is allowed to pass through between the gravure roller 35 and thepressure roller 36, the ceramic paste 37 is printed onto one majorsurface of the ceramic green sheet of the composite sheet except forregions in which the internal electrodes 28 are formed (see FIG. 2C).That is, around the internal electrodes 28, ceramic paste layers 48 forsmoothing steps are formed. Subsequently, the composite sheet thusformed is supplied to a drying furnace 40 through a roller 39, and inthis drying furnace 40, the ceramic paste layers 48 are dried. Whenbeing in a semi-dried state, the internal electrodes 28 are also driedin the drying furnace 40. As described above, a composite sheet 41 shownin FIG. 2C is supplied from the drying furnace 40 through a roller 42.

The second drying furnace 40 has a structure that is substantiallyequivalent to that of the first drying furnace 30. However, heating inthe drying furnace 40 is performed so as to dry the ceramic paste layers48. As described above, the composite sheet 41 shown in FIG. 2C isobtained, and when a plurality of the composite sheets 41 is laminatedto each other, a laminate is obtained. In this preferred embodiment, asshown in FIG. 3, when the composite sheets 41 are laminated to eachother, a plain ceramic green sheet 44 is first laminated on a laminationstage 43. The ceramic green sheet provided on the base film 2 is unwoundfrom the take-up reel 7, is then cut, for example, into a substantiallyrectangular shape, and subsequently, is transferred on the laminationstage 43, thereby forming the plain ceramic green sheet 44. In thispreferred embodiment, the plain ceramic green sheet 44 may be formed byprinting ceramic paste directly onto the lamination stage 43, or may becomposed of a plurality of plain ceramic green sheets 44.

Next, the composite sheet 41 shown in FIG. 2C is punched out into apredetermined shape and is then provided on the ceramic green sheet 44by a transfer method, and subsequently, the base film 2 is peeled off.In a step of punching out the composite sheet 41, the composite sheet 41is punched out, for example, into a substantially rectangular shape. Thebase film 2 may not be punched out. That is, while being provided on thebase film 2 which is half cut, the composite sheet 41 which is punchedout may be transferred, or the composite sheet 41 which is punched outtogether with the base film 2 may be laminated on the ceramic greensheet 44 by transfer.

Both the transfer and the lamination of the composite sheet 41 are eachrepeated at least two times, thereby forming a mother laminate 46 shownin FIG. 3.

In this preferred embodiment, the composite sheet 41 is formed on thebase film 2, and transfer of the composite sheet 41 thus formed on thebase film 2 is performed at least two times. However, as shown in FIG.4, a plurality of the composite sheets 41 may be formed on the base film2. That is, a plurality of the composite sheets 41 is laminatedbeforehand on the base film 2 by transfer (the composite sheet 41 sideis laminated by compression, and the base film 2 is then removed), andthe laminate thus obtained may be transferred onto the lamination stage43. In addition, by processing the composite sheet 41 alternately by thedie coater shown in FIG. 1A and by the first and second gravure printingapparatuses shown in FIG. 1B at least two times, a plurality of thecomposite sheets 41 is laminated beforehand on the base film 2, and thelaminate thus obtained may be transferred on the lamination stage 43. Inthese cases, since a plurality of the composite sheets 41 is laminatedon one surface of the base film 2, the number of transfer performed onthe lamination stage 43 can be decreased.

The mother laminate 46 thus formed is compressed in the thicknessdirection and is then cut into laminates each used for forming oneceramic capacitor. In this case, since the ceramic paste layers forsmoothing steps are formed between the internal electrodes, steps areprevented from being formed between the portion at which the internalelectrodes overlap each other and the portion at which the internalelectrodes are not formed.

Subsequently, by firing each multilayer ceramic capacitor unit thusformed, a ceramic sintered body 51 shown in FIG. 5 is obtained. When afirst and a second external electrode are formed on two end surfaces ofthe ceramic sintered body 51, a multilayer ceramic capacitor 52 shown inFIG. 6 is obtained. In the multilayer ceramic capacitor 52, the ceramicsintered body 51 includes a plurality of internal electrodes 28A, whichare obtained by cutting the internal electrodes 28 described above, andlaminated to each other with ceramic layers provided therebetween. Inaddition, external electrodes 53 and 54 are each formed to be connectedto the internal electrodes.

According to the manufacturing method of this preferred embodiment, asdescribed above, by using the die coater 4, the ceramic green sheet 10is formed. Hence, the productivity of the ceramic green sheet can beimproved. In addition, as described above, the ceramic green sheet 10has a minimal small variation in thickness, significantly fewer defects,and superior surface smoothness. In addition, by using the first and thesecond gravure printing apparatuses, the internal electrodes and thestep-smoothing ceramic paste can be continuously performed. As a result,the composite sheets 41 used for forming the laminate described abovecan be efficiently formed, and hence, in addition to improvement inproductivity of the multilayer capacitor 52, a significant decrease invariations of the properties can be achieved.

In addition, in this preferred embodiment, since the drying conditionsfor the internal electrodes 28 and those for the step-smoothing ceramicpaste can be separately determined, overdrying or underdrying of theinternal electrode 28 and the step-smoothing ceramic paste can bereliably prevented. That is, when the internal electrodes and thestep-smoothing ceramic paste are simultaneously dried as in aconventional example, overdrying or underdrying may occur for theinternal electrodes or the ceramic paste described above in some cases.However, in this preferred embodiment, the overdrying or underdrying asdescribed above is reliably prevented.

In this preferred embodiment, since the step-smoothing ceramic paste isprinted after the internal electrodes 28 are formed and are then driedonce, influence of the solvent, which is contained in the conductivepaste forming the internal electrodes, on the ceramic green sheet can bedecreased. In addition, when the ceramic paste is printed, the internalelectrodes are unlikely to be damaged, and both the internal electrodesand the ceramic paste can be formed with high accuracy.

In addition, for example, when the drying conditions are optimized sothat the internal electrodes are each dried without being damaged orpeeled off even when convex portions (portions other than concaveportions in which the step-smoothing ceramic paste is supplied) of thegravure roller compress the internal electrodes, in a step of printingthe step-smoothing ceramic paste, since being compressed by the convexportions of the gravure roller, the internal electrodes can beplanarized or smoothed.

Furthermore, since the step-smoothing ceramic paste is printed after theinternal electrodes are dried, when the step-smoothing ceramic paste isrepeatedly printed along the periphery of the internal electrode patternin order to solve a problem of printing misalignment of thestep-smoothing ceramic paste, the peripheral portions of the internalelectrode pattern are planarized or smoothed, and hence the smoothnessin the boundaries between the internal electrodes and the step-smoothingceramic paste is further improved.

Alternatively, in various preferred embodiments of the presentinvention, after printing and drying of the step-smoothing ceramic pasteare performed, the internal electrodes may be printed followed bydrying. In this case, as is the case described above, influence of thesolvent on the ceramic green sheet is minimized, and in addition, boththe internal electrodes and the ceramic paste are printed with highaccuracy.

As described above, since the thickness of the ceramic green sheet isuniformly formed by the die coater 4, variations in tension of the sheetcan be decreased when gravure printing is performed, and hence alignmentof the internal electrodes with the step-smoothing ceramic paste can beperformed with high accuracy. Since the surface of the ceramic greensheet 10 is smooth, the internal electrodes 28 and the step-smoothingceramic paste can be applied to the smooth ceramic green sheet with highaccuracy by gravure printing. As a result, the external dimensionaccuracies and the surface smoothness of the internal electrodes and thestep-smoothing ceramic paste can be improved.

In this preferred embodiment, since the ceramic green sheet is formedpreferably by using the die coater 4, as described above, a ceramicgreen sheet having a very small thickness of approximately 2 μm or lesscan be accurately formed without generating defects such as pinholes. Asa result, a high-capacitance multilayer ceramic capacitor formed of agreat number of layers laminated to each other can be readily andreliably formed.

In addition, in this preferred embodiment, after being formed by the diecoater 4, the ceramic green sheet 10 provided on the base film 2 istaken up by the take-up reel 7. Hence, a problem of unbalance betweenthe formation of the ceramic green sheet at a high speed by the diecoater 4 and the gravure printing at a low speed can be solved. That is,when gravure printing is performed right after the ceramic green sheetis formed by the die coater 4, since the speed is low in the followinggravure printing step, both steps cannot be well balanced. However, inthis preferred embodiment, since the ceramic green sheet 10 provided onthe base film 2 is taken up once by the take-up reel 7, the problem ofunbalance in the speed described above can be solved.

As another preferred embodiment, when the laminate 46 is formed, asecond ceramic green sheet 100 may be formed on the composite sheet 41shown in FIG. 2C by a die coating method, as in the above-describedpreferred embodiment, for forming an intermediate laminate 410.Subsequently, a plurality of the intermediate laminates 410 thus formedmay be laminated to each other to form a laminate 460 shown in FIG. 10.

In the laminate 460, the ceramic green sheet 10 and the second ceramicgreen sheet 100 are bonded to each other to form a dielectric layer 110.The thickness of this dielectric layer 110 is preferably approximately3.0 μm or less, and hence the thicknesses of the ceramic green sheet 10and the second ceramic green sheet 100 are determined so as to meet thethickness described above.

The laminate 460 is cut in the thickness direction so as to formindividual unit bodies, and the unit bodies thus formed are coated withconductive paste and are then fired to form external electrodes, therebyforming multilayer ceramic capacitors.

According to the structure described above, since the dielectric layeris formed of the ceramic green sheet 10 which is influenced by thesolvent contained in the conductive paste and the second ceramic greensheet 100 which is not influenced thereby, sheet damage to thedielectric layer by the solvent can be minimized, and henceshort-circuiting or insulation defects between the layers are reliablyprevented.

In addition, it is preferable that the thickness of the ceramic greensheet 10 be sufficiently smaller than that of the second ceramic greensheet 100. That is, the ceramic green sheet 10 incurs the sheet damagebecause of the solvent contained in each paste. Accordingly, as theratio in thickness of the ceramic green sheet 10 to the dielectric layeris decreased, the influence on the dielectric layer can be decreased.

When the intermediate laminate 410 is formed, the step-smoothing ceramicpaste and the second ceramic green sheet may be simultaneously formed bya die coating method.

According to the method of a preferred embodiment of the presentinvention for manufacturing a multilayer ceramic electronic element, theceramic green sheet is first formed on the base film by using the diecoater. In a conventional method for forming a ceramic green sheet bygravure printing, the ceramic green sheet is formed at a low speed, andwhen a thin ceramic green sheet that is approximately 2 μm thick or lessis formed, problems may arise in that pinholes are liable to be formed,and that irregularities may be formed on the surface of the ceramicgreen sheet. In contrast, according to preferred embodiments of thepresent invention, since the formation of the ceramic green sheet isperformed using the die coater, the ceramic green sheet can be formed ina short period of time. In addition, even when the ceramic green sheethas a small thickness, structural defects such as pinholes are unlikelyto occur. Furthermore, the surface smoothness of the ceramic green sheetcan be improved, and in addition, variations in thickness can besignificantly decreased.

Since the speed for forming the ceramic green sheet can be increasedaccording to preferred embodiments of the present invention, the costfor manufacturing the ceramic green sheet, in other words, the cost formanufacturing a multilayer ceramic electronic element, is significantlydecreased.

In addition, since the ceramic green sheet of preferred embodiments ofthe present invention has superior surface smoothness and a very smallvariation in thickness, when printing of the internal electrodes andthat of the step-smoothing ceramic paste are then performed by gravureprinting, the internal electrodes and the ceramic paste can also beformed on the ceramic green sheet with high accuracy.

In particular, when the conductive paste for forming the internalelectrodes or the step-smoothing ceramic paste is printed by gravureprinting, in order to improve leveling properties after transfer and toimprove wettability when transfer is performed, paste having arelatively low viscosity is frequently used as the paste describedabove. However, the paste having a low viscosity is liable to exude.This exudation mentioned above becomes more likely to occur as thedegree of surface roughness of the ceramic green sheet to which thepaste is applied is increased. However, according to preferredembodiments of the present invention, since the surface smoothness ofthe ceramic green sheet is greatly improved as described above, evenwhen paste having a low viscosity is used, the exudation described aboveis prevented from occurring. As a result, with the improvement describedabove, the exterior-dimension accuracies of the internal electrodes andthe step-smoothing ceramic paste is also greatly improved.

In addition, when the internal electrodes and the step-smoothing ceramicpaste are sequentially printed by gravure printing, in other words, whentwo-color printing is performed, variations in tension of the base filmand meandering thereof must be suppressed, and in addition, a ceramicgreen sheet having a very small variation in thickness must be prepared.When variations in thickness in the length direction of the long ceramicgreen sheet are generated, the length of the ceramic green sheet in apath line between the first and the second gravure printing apparatusesmay vary, and as a result, accuracy in positioning in the lengthdirection is degraded. Furthermore, when the thickness of the ceramicgreen sheet varies in the width direction, meandering occurs, and as aresult, the accuracy in positioning in the width direction is degradedwhen gravure printing is performed.

According to a conventional method in which the formation of a ceramicgreen sheet is also performed by gravure printing, when the thickness ofthe ceramic green sheet in the length direction is changed, for example,by about 1 μm, the path line length is changed by approximately 13 μm,and as a result, the accuracy in positioning in the length direction isdegraded. In addition, concerning the accuracy in the width direction,for example, when the thickness of a sheet at one side is larger thanthat at the other side of the sheet, the sheet meanders to the side atwhich the thickness of the sheet is smaller, and hence the accuracy inpositioning in the width direction is degraded.

In contrast, according to preferred embodiments of the presentinvention, since the ceramic green sheet having a very small variationin thickness can be formed by the die coater as described above, whenthe internal electrodes and the step-smoothing ceramic paste are printedby performing gravure printing twice, the printing accuracies in thelength direction and in the width direction are effectively improved.

According to preferred embodiments of the present invention, when theformation of the ceramic green sheet using the die coater and theprinting of the internal electrodes and the step-smoothing ceramic pasteusing gravure printing are performed in combination, the accuracies inexternal dimensions and positioning of the ceramic green sheet, and theinternal electrodes and the step-smoothing ceramic paste, which areformed on the ceramic green sheet, can be effectively improved, and as aresult, a multilayer ceramic electronic element having a small variationin properties can be reliably obtained with a high productivity.

Furthermore, a particularly novel feature of preferred embodiments ofthe present invention is that the step of drying or semi-drying theinternal electrodes is performed continuously after the formationthereof. Accordingly, the affect on the ceramic green sheet of thesolvent contained in the conductive paste for forming the internalelectrodes is reliably prevented, and hence the damage to the internalelectrodes is minimized. In addition, since the gravure roller forsmoothing steps can planarize the internal electrodes, both the internalelectrodes and the step-smoothing ceramic paste are formed with highaccuracy.

While the present invention has been described with reference to whatare at present considered to be the preferred embodiments, it is to beunderstood that various changes and modifications may be made theretowithout departing from the present invention in its broader aspects andtherefore, it is intended that the appended claims cover all suchchanges and modifications that fall within the true spirit and scope ofthe invention.

1. A method for manufacturing a multilayer ceramic electronic element,comprising the steps of: preparing a composite sheet by sequentialperformance of the following steps a)-j) in that order; a) applyingceramic slurry to a base film using a die coater for forming a ceramicgreen sheet; b) applying conductive paste to an upper surface of theceramic green sheet by gravure printing for forming internal electrodes;c) drying the conductive paste to form internal electrodes; d) applyingstep-smoothing ceramic paste by gravure printing onto the upper surfaceof the ceramic green sheet in regions other than those in which theinternal electrodes are formed; e) drying the step-smoothing ceramicpaste; f) applying ceramic slurry to the internal electrodes and thedried ceramic paste using a die coater to form another ceramic greensheet; g) applying conductive paste to an upper surface of the anothergreen sheet by gravure printing for forming internal electrodes; h)drying the conductive paste applied in step g) to form internalelectrodes; i) applying step-smoothing ceramic paste by gravure printingonto the upper surface of the another ceramic green sheet in regionsother than those in which the internal electrodes are formed; and j)drying the step-smoothing ceramic paste applied in step i); preparing alaminate body by laminating a plurality of the composite sheets to eachother; and firing the laminate body for forming a sintered body for amultilayer ceramic electronic element; wherein the internal electrodesare smoothed during the gravure printing of the step-smoothing ceramicpaste by pressure applied to the internal electrodes by a gravure rollerand a pressure roller; the base film is a long base film; and thegravure printing is performed using a plurality of rollers forconveying, the gravure roller, and the pressure roller.
 2. A method formanufacturing a multilayer ceramic electronic element according to claim1, further comprising the steps of: laminating at least one additionalceramic green sheet having neither the internal electrodes nor thestep-smoothing ceramic paste applied thereto to the conductive paste andthe step-smoothing ceramic paste of the composite sheet; firing thelaminate body and the at least one additional ceramic green sheet forforming a sintered body; and forming external electrodes on externalsurfaces of the sintered body so as to be electrically connected to theinternal electrodes.
 3. A method for manufacturing a multilayer ceramicelectronic element according to claim 1, wherein the step of applyingconductive paste is performed while the long base film is conveyed in alength direction thereof.
 4. A method for manufacturing a multilayerceramic electronic element according to claim 3, wherein the step ofapplying step-smoothing ceramic paste is continuously performed whilethe ceramic green sheets provided on the long base film are conveyed inthe length direction thereof.
 5. A method for manufacturing a multilayerceramic electronic element according to claim 1, wherein the ceramicgreen sheets and the step-smoothing ceramic paste primarily form adielectric ceramic used for a multilayer ceramic capacitor as themultilayer ceramic electronic element.
 6. A method for manufacturing amultilayer ceramic electronic element according to claim 1, wherein asecond ceramic green sheet is laminated on the conductive paste and thestep-smoothing ceramic paste for forming a three-layered intermediatecomposite sheet.
 7. A method for manufacturing a multilayer ceramicelectronic element according to claim 1, wherein the laminate body thusobtained is transferred on the lamination stage.
 8. A method formanufacturing a multilayer ceramic electronic element according to claim1, wherein the steps b) and d) are sequentially performed by two gravureprinting machines which are prepared to perform the respective steps. 9.A method for manufacturing a multilayer ceramic electronic element,comprising the steps of: preparing a composite sheet by sequentialperformance of the following steps a)-j) in that order; a) applyingceramic slurry to a base film using a die coater for forming a ceramicgreen sheet; b) applying step-smoothing ceramic paste by gravureprinting onto an upper surface of the ceramic green sheet; c) drying thestep-smoothing ceramic paste; d) applying conductive paste to the uppersurface of the ceramic green sheet by gravure printing for forminginternal electrodes in regions other than those in which the driedceramic paste is applied; e) drying the conductive paste to forminternal electrodes; f) applying ceramic slurry to the internalelectrodes and dried ceramic paste using a die coater to form anotherceramic green sheet; g) applying step-smoothing ceramic paste by gravureprinting onto an upper surface of the another ceramic green sheet; h)drying the step-smoothing ceramic paste applied in step g); i) applyingconductive paste to the upper surface of the another ceramic green sheetby gravure printing for forming internal electrodes in regions otherthan those in which the ceramic paste dried in step h) is formed; and j)drying the conductive paste applied in step i) to form internalelectrodes; preparing a laminate body by laminating a plurality of thecomposite sheets to each other; and firing the laminate body for forminga sintered body for a multilayer ceramic electronic element; wherein thedried ceramic paste is smoothed during the gravure printing of theinternal electrodes by pressure applied to the dried ceramic paste by agravure roller and a pressure roller; the base film is a long base film;and the gravure printing is performed using a plurality of rollers forconveying, the gravure roller, and the pressure roller.
 10. A method formanufacturing a multilayer ceramic electronic element according to claim9, further comprising the steps of: laminating at least one additionalceramic green sheet having neither the internal electrodes nor thestep-smoothing ceramic paste applied thereto to the conductive paste andthe step-smoothing ceramic paste of the composite sheet; firing thelaminate body and the at least one additional ceramic green sheet forforming a sintered body; and forming external electrodes on externalsurfaces of the sintered body so as to be electrically connected to theinternal electrodes.
 11. A method for manufacturing a multilayer ceramicelectronic element according to claim 9, wherein the step of applyingstep-smoothing ceramic paste is performed while the long base film isconveyed in a length direction thereof.
 12. A method for manufacturing amultilayer ceramic electronic element according to claim 11, wherein thestep of applying conductive paste is continuously performed while theceramic green sheets provided on the long base film are conveyed in thelength direction thereof.
 13. A method for manufacturing a multilayerceramic electronic element according to claim 9, wherein the ceramicgreen sheets and the step-smoothing ceramic paste primarily form adielectric ceramic used for a multilayer ceramic capacitor as themultilayer ceramic electronic element.
 14. A method for manufacturing amultilayer ceramic electronic element according to claim 9, wherein asecond ceramic green sheet is laminated on the conductive paste and thestep-smoothing ceramic paste for forming a three-layered intermediatecomposite sheet.
 15. A method for manufacturing a multilayer ceramicelectronic element according to claim 9, wherein the laminate body thusobtained is transferred on the lamination stage.
 16. A method formanufacturing a multilayer ceramic electronic element according to claim9, wherein the steps b) and d) are sequentially performed by two gravureprinting machines which are prepared to perform the respective steps.